Laboratory & Small Series System
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The small one – mobile, functional and cost-effective – suitable for your laboratory.
The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual and Basic PC control is primarily intended for the following applications:
Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology
| Specifications | Zepto Semi-automatic kHz / Semi-automatic MHz |
Zepto PC kHz / PC MHz |
Zepto RIE Semi-automatic MHz |
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| Dimensions | W: 425 mm H: 185 mm D: 450 mm | W: 425 mm H: 310 mm D: 450 mm | |
| Power Supply | 230 V | 16 A | ||
| Vacuum Chamber |
Borosilicate glass round, Hinged door Ø: 105 mm D: 300 mm Volume approx. 2.6 L |
Aluminium round, with lid Ø: 190 mm H: 60 mm Volume approx. 1 L |
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| Gas Supply | 2 x needle valve | 2 x MFC | 2 x needle valve |
| Generator |
40 kHz | Power output 0 – 100 W 13,56 MHz | Power output 0 – 200 W |
13,56 MHz | Power output 0 – 200 W | |
| Electrode | Electrode pair outside the vacuum chamber | Electrode inside the vacuum chamber – Ø: 160 mm for max. 6″ wafer | |
| Control Unit | Semi-automatic control unit | 7″ Basic PC control unit (Windows Embedded Compact 7) | Semi-automatic control unit |
| Power Supply | 230 V | 50 – 60 Hz | ||
| Pressure Measurement | Pirani | ||
| Pump | Suction capacity min. 3 m³/h | ||