Low-Pressure Plasma Systems
The Tetra 320R production system with its chamber volume of 320 litres and PC control is used in series production (cleaning, etching and activation).
| Specifications | |
|---|---|
| Control Cabinet | W 870 mm, H (with feet) 1860 mm, D 1400 mm |
| Chamber | ∅ 640 mm, D 1000 mm |
| Chamber Volume | Approx. 320 litres |
| Gas Supply | 2 gas channels via MFCs |
| Generator | 1 pc. (80 kHz/ 1000 Watt) |
| Control | PC control (Windows) |
| Parts Holding Fixture | according to customer requirements |