Tetra 30

Production Systems

Tetra 30

Approx. 34 liter chamber volume. Tetra 30 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 30 plasma systems. Tetra 30 plasma systems are used primarily in the following areas:

  • Analytics (REM, TEM)
  • Archeology
  • Automotive
  • Biotechnology
  • Elastomer technology
  • Electronics
  • Electron microscopy
  • Precision technology
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Solar technology
  • Textiles

    • Types of Tetra 30 Plasma Systems

    Model Type Description
    Model 1
    • Standard system
    • BASIC PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 305 mm, D: 370 mm, H: 300 mm)
    • Gas supply: MFC
    Model 2
    • Standard system
    • FULL PC control in basic unit type A
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 305 mm, D: 370 mm, H: 300 mm)
    • Gas supply: MFC
    Model 3
    • Corrosive gas system (e.g. for fluorinated process gases)
    • BASIC PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 305 mm, D: 370 mm, H: 300 mm)
    • Gas supply: MFC
    Model 4
    • Corrosive gas system (e.g. for fluorinated process gases)
    • FULL PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 305 mm, D: 370 mm, H: 300 mm)
    • Gas supply: MFC
    Model 5
    • Plasma polymerisation system
    • BASIC PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 305 mm, D: 370 mm, H: 300 mm)
    • Gas supply: MFC
    Model 6
    • Plasma polymerisation system
    • FULL PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 305 mm, D: 370 mm, H: 300 mm)
    • Gas supply: MFC

    Specifications

    Basic Equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 34 – 57 litres, depending on the version
    • Voltage supply: 230 V or 400 V/3-phase
    Gas Supply
    • Mass Flow Controllers (MFCs)
    Vacuum Chambers
    • Stainless steel, rectangular, hinged door
      (approx. W 305 mm x H 300 mm x D 370 mm or 625 mm)
    Charge
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multi-tier
    • RIE electrodes with gas shower
    Control
    • Basic PC control (Microsoft Windows CE)
    • Full PC control (Microsoft Windows 10 IoT)
    Pressure Measurement
    • Pirani
    • Capacity pressure gauge (for corrosive gas version)
    Timer
    • integrated in the PC
    Generators
    • Frequencies:
      80 kHz: Power 1000 W or 3000 W
      13.56 MHz: Power 0 – 300 W; 0 – 600 W
      2.45 GHz: Power 0 – 600 W; 0 – 1200 W

      All generators are infinitely adjustable from 0 – 100 %
    Vacuum Pumps
    • In different sizes and from different manufacturers (if required with activated carbon filter)
    Additional Options
    • Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.