Tetra 2800

Production Systems

Tetra 2800

Approx. 2800 liter chamber volume. The production system Tetra 2800 LF-PC with its 2800-litre chamber volume and PC control is mainly used in series production (cleaning, etching and activation). Tetra 2800 is used in the following areas:

  • Analytics
  • Archaeology
  • Automotive
  • Research and development departments
  • Semiconductor technology
  • Small batch production
  • Plastics Technology
  • Medical engineering
  • Micro-system technology
  • Sensor technology
  • Sterilising
  • Textile technology

    • Specifications

    Control Cabinet
    • integrated: W 600 mm, H 1700 mm, D 800 mm
    Vacuum Chambers
    • ∅ 1200 mm, D 2500 mm
    Chamber Volume
    • Approx. 2800 litres
    Gas Supply
    • 3 gas channels via MFCs
    Generators
    • All common plasma frequencies are available
    Control
    • PC control (Windows) with industrial field bus