Tetra 100

Production Systems

Tetra 100

Approx. 100 liter chamber volume. Tetra 100 plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Tetra 100 plasma systems. Tetra 100 plasma systems are used primarily in the following areas:

  • Analytics (SEM, TEM)
  • Archaeology
  • Automotive
  • Life Sciences
  • Elastomer technology
  • Electrical engineering
  • Electron microscopy
  • Precision engineering
  • Research and development
  • Semiconductor technology
  • Small batch production
  • Plastics technology
  • Medical engineering
  • Micro-system technology
  • Solar cell technology
  • Textile technology

    • Types of Tetra 100 Plasma Systems

    Model Type Description
    Model 1
    • Standard system
    • BASIC PC control in basic unit type A
    • Vacuum chamber rectangular, stainless steel, hinged door
      (W: 400 mm, D: 625 mm, H: 400 mm)
    • Gas supply: MFC
    Model 2
    • Standard system
    • FULL PC control in basic unit type A
    • Vacuum chamber rectangular, aluminium, hinged door
      (W: 400 mm, D: 625 mm, H: 400 mm)
    • Gas supply: MFC
    Model 3
    • Plasma polymerisation system
    • BASIC PC control in basic unit type A
      (W 850 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, aluminium, hinged door
      (W 400 mm, D: 625 mm, H: 400 mm)
    • Gas supply: MFC
    Model 4
    • Corrosive gas system (e.g. for fluorinated process gases)
    • FULL PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, stainless steel, hinged door
      (W: 400 mm, D: 625 mm, H: 400 mm)
    • Gas supply: Needle valve
    Model 5
    • Plasma polymerisation system
    • BASIC PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, stainless steel, hinged door
      (W: 400 mm, D: 625 mm, H: 400 mm)
    • Gas supply: MFC
    Model 6
    • Plasma polymerisation system
    • FULL PC control in basic unit type A
      (W 600 mm x D 800 mm x H 1,700 mm)
    • Vacuum chamber rectangular, stainless steel, hinged door
      (W: 400 mm, D: 625 mm, H: 400 mm)
    • Gas supply: MFC

    Specifications

    Basic Equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 80 – 100 litres, depending on the version
    • Power supply: 230 V or 400 V/3-phase
    Gas Supply
    • Mass Flow Controllers (MFCs)
    Vacuum Chambers
    • Stainless steel, round, hinged door
      (approx. ∅ 400 mm, L 625 mm)
    • Stainless steel, rectangular, hinged door
      (approx. W 400 x H 400 mm D 625 mm)
    Charge
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multi-tier
    • RIE electrodes with gas shower
    Controls
    • Basic PC control (Microsoft Windows CE)
    • Full PC control (Microsoft Windows IoT)
    Pressure Measurement
    • Pirani
    • Capacity pressure gauge (for corrosive gas version)
    Timer
    • Integrated in the PC
    Generators
    • Frequencies:
      80 kHz: Power 1000 W – 3000 W
      13.56 MHz: Power 0 – 300 W; 0 – 600 W; 0 – 1000 W
      2.45 GHz: Power 0 – 1200 W

      All generators are continuously adjustable from 0 – 100 %
    Vacuum Pumps
    • In different sizes and from various manufacturers (if required with activated carbon filter)
    Additional Options
    • Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.