Pico

Laboratory & Small Series System

Pico

Approx. 5 liter chamber volume. Pico plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Pico plasma systems.

Application

Pico is used in the following areas:

  • Analytics (SEM, TEM)
  • Archaeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics technology
  • Medical engineering
  • Micro-system technology
  • Sensor technology
  • Sterilizing
  • Textiles technology

    • Specifications

    Basic Equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 4 – 15 litres, depending on the version
    • Power supply: 230 V for table top systems, 400 V/3-phase for stand-alone systems
    Gas Supply
    • Needle valve
    • Mass Flow Controllers (MFCs)
    Vacuum Chambers
    • Stainless steel, round, with lid
      (approx. ∅ 150 mm, L 320 mm or L 600 mm)
    • Stainless steel, rectangular, with hinged door
      (approx. W 160 x H 160 x D 325 or 600mm)
    • Aluminium rectangular, hinged door
      (approx. ∅ 160 mm x 160 mm or L 325 mm or L 600 mm)
    • Quartz glass (UHP), round, with lid or hinged door
      (approx. ∅ 130 mm, L 300 mm or L 600 mm)
    • Borosilicate glass (UHP), round, with lid
      (approx. ∅130 mm, L 300 mm or L 600 mm)
    Load
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multi-tier
    • RIE
    Control
    • Semi-automatic
    • Basic PC control (Microsoft Windows CE)
    • Full PC control (Windows 10 IoT)
    Pressure Measurement
    • Pirani
    • Capacity pressure gauge (for corrosive gas version)
    Timer
    • Digital
    Generators
    • Frequencies:
      40 kHz: Power 0 – 200 W; 0 – -1000 W
      100 kHz: Power 500 W
      80 kHz: Power 1000 W
      13.56 MHz: Power 0 – 100 W; 0 – 300 W
      2.45 GHz: Power 0 – 300 W

      All generators are infinitely adjustable from 0 – 100 %
    Vacuum Pumps
    • In different sizes and from various manufacturers (if required with activated carbon filter)
    Additional Options
    • Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.