Nano

Laboratory & Small Series System

Nano

Approx. 24 liter chamber volume. Nano plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Nano plasma systems.

Application

Nano is used in the following areas:

  • Analytics
  • Archeology
  • Automotive
  • Research and Development departments
  • Semiconductor technology
  • Small batch production
  • Plastics
  • Medical technology
  • Micro-system technology
  • Sensors
  • Sterilization
  • Textiles

    • Specifications

    Basic Equipment
    • The housing size varies depending on the components/options
    • Chamber volumes: 18 – 36 litres, depending on the version
    • Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices
    Gas Supply
    • Needle valve
    • Mass Flow Controllers (MFCs)
    Vacuum Chambers
    • Stainless steel, round, with lid
      (approx. ∅ 267 mm, L 420 mm or L 600 mm)
    • Stainless steel, rectangular, hinged door
      (approx. W 240 mm x H 240 mm x D 420 mm or 600 mm)
    • Aluminium rectangular, hinged door
      (approx. ∅ 240 mm x 240 mm, L 420 mm or L 600 mm)
    • Quartz glass (UHP), round, with lid or hinged door
      (approx. ∅ 240 mm, L 400 mm or L 600 mm)
    • Borosilicate glass (UHP), round, with lid or hinged door
      (approx.∅ 240 mm, L 400 mm or L 600 mm)
    Charge
    • Product carrier (Option: water-cooled), quartz glass boats, powder rotary drum, bulk material rotary drum, aluminium sheet, stainless steel sheet, borosilicate glass, quartz glass
    Electrodes
    • Single, or multi-tier
    • RIE
    Control
    • Semi-automatic
    • Basic PC control (Microsoft Windows CE)
    • Full PC control (Microsoft Windows IoT)
    Pressure Measurement
    • Pirani
    • Capacity pressure gauge (for corrosive gas version)
    Timer
    • Digital
    Generators
    • Frequencies:
      100 kHz: Power 500 W
      80 kHz: Power 1000 W
      13.56 MHz: Power 0 – 100 W; 0 – 300 W
      2.45 GHz: Power 0 – 600 W;

      All generators are continuously adjustable from 0 – 100 %
    Vacuum Pumps
    • In different sizes and from different manufacturers (if required with activated carbon filter)
    Additional Options
    • Spare parts kit, pressure gauge, corrosive gas design, gas bottles, pressure reducer, heater plate, temperature display, heatable chamber, Faraday cage, plasma polymerisation accessories, test inks, oxygen generator, slow ventilation, slow pump-off, TEM sample holder flange, maintenance/service, documentation in local language, installation on site incl. training. Further options available on request.