Approx. 2 litre chamber volume. Femto plasma systems can be combined in various forms, as in a modular system. The following provides an overview of the most common options in conjunction with Femto plasma systems.
Application
Femto is used in the following areas:
Analytics
Archeology
Automotive
Research and Development
Semiconductor technology
Small batch production
Plastics
Medical technology
Micro-system technology
Sensors
Sterilization
Textiles
Types of Femto Plasma Systems
Model 1A base unit type A incl.
semi-automatic control
Vacuum chamber type A
(round, stainless steel,
cover, diam: 100mm, D: 278mm)
Gas supply
Needle valve
Model 1base unit type B incl.
manual control
Vacuum chamber type A
(round, stainless steel,
cover, diam: 100mm, D: 278mm)
Gas supply
Needle valve
Model 1C base unit type C incl.
semi-automatic control
Vacuum chamber type G
(rectangular, aluminium, hinged door,
W:110 mm, H:120 mm, D: 300 mm)
Gas supply
Needle valve
Model 3 base unit type B incl.
Basic Pc control (Windows CE)
Vacuum chamber type G
(rectangular, aluminum, hinged door,
W:110 mm, H:120 mm, D: 300 mm)
Gas supply
MFC
Model 4 base unit type B incl.
full Pc control (Windows 10 IoT)
Vacuum chamber type G
(rectangular, aluminium, hinged door,
W:110 mm, H:120 mm, D: 300 mm)
Gas supply
MFC
Specifications
Basic Equipment
The housing size varies depending on the components/options
Chamber volumes: 1.9 – 6 litres, depending on the version
Power supply: 230 V for table top devices, 400 V/3-phase for stand-alone devices
Gas Supply
Needle valve
Mass Flow Controllers (MFCs)
Vacuum Chambers
Stainless steel, round with lid
(approx. ∅ 100 mm, L 278 mm or L 600 mm)
Stainless steel, rectangular, hinged door
(approx. W 103 x D 285 x H 103)
Aluminium, round, with lid or hinged door
(approx. ∅ 95 mm, L 280 mm or L 600 mm)
Quartz glass (UHP), round, with lid or hinged door
(approx. ∅ 95 mm, L 280 mm or L 600 mm)
Borosilicate glass (UHP), round, with lid or hinged door
(approx. ∅ 95 mm, L 280 mm or L 600 mm)
