Laboratory & Small Series System
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The 10.5 litre LOW-COST PLASMA LAB SYSTEM ATTO with manual and Basic PC control is primarily intended for the following applications:
Small-series manufacture, analytics (SEM, TEM), medical engineering, sterilising, research and development departments, archaeology, textile technology, plastics technology
| Specifications | Atto Semi-automatic kHz / Semi-automatic MHz |
Atto PC kHz / PC MHz |
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| Dimensions | W: 525 mm H: 257 mm D: 420 mm | |
| Power Supply | 230 V | 50 – 60 Hz | |
| Vacuum Chamber |
Borosilicate glass round, Hinged door Ø: 211 mm D: 300 mm Volume approx. 10.5 L |
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| Gas Supply | 2 x needle valve | 2 x MFC |
| Generator |
40 kHz | Power output 0 – 200 W 13,56 MHz | Power output 0 – 300 W |
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| Electrode | The electrode is located outside the vacuum chamber | |
| Control Unit | Semi-automatic control unit |
7″ Basic PC control unit (Windows Embedded Compact 7) |
| Power Supply | 230 V | 50 – 60 Hz | |
| Pressure Measurement | Pirani | |
| Pump | Suction capacity min. 6 m³/h | |